The application of orgnaization of jiggle of the pottery and porcelain that suppress report in exceeding accurate turning

Keywords: Superprecision Turning1 of 　 of Piezoelectric Ceramic Inching-motio Device. Foreword jiggle orgnaization shows journey limits is resolution of millimeter class, displacement and fixed position precision to amount to accept rice class commonly (even Yanami class) displacement orgnaization. Jiggle orgnaization normally by small displacement implement with accurate slideway two parts are comprised. Used the jiggle orgnaization of all sorts of types in great quantities in machining, but in exceeding accurate turning to machine, the application of orgnaization of jiggle of the pottery and porcelain that suppress report is most wide. The working principle of orgnaization of jiggle of the pottery and porcelain that suppress report basically is based on go against piezoelectric effect, the jiggle orgnaization photograph with other type is compared, have volume small, stiffness tall, frequency answers resolution of big, displacement and fixed position precision not tall, calorific, without noise, control easily wait for an advantage [1] . Come nearly 10 years, the function of orgnaization of jiggle of the pottery and porcelain that suppress report rises ceaselessly, already entered practical phase stage by stage. At present abroad presses the control precision of orgnaization of jiggle of electric pottery and porcelain to already reached accept rice level, frequency noise achieves on thousand hertz; Of the orgnaization of jiggle of the pottery and porcelain that suppress report that home develops repeated classics of Si of fixed position precision to achieve ± 0. 01 μ M, frequency noise achieves hundreds hertz. The orgnaization of jiggle of the pottery and porcelain that suppress report that applies at exceeding accurate turning to machine at present basically is one peace keeping orgnaization of 2 dimension jiggle. 2. Orgnaization of jiggle of the pottery and porcelain that suppress report exceeds accurate turning in the application in exceeding accurate turning is a kind of important treatment way in superprecision, basically use at machining metallic plane lens of optics of the lens of illuminator, infra-red germanium, curved surface that be not a ball surface exceeding essence of life. Want implementation to exceed accurate turning, deploy except need outside exceeding accurate lathe, high accuracy to measure equipment and sharp diamond cutting tool, orgnaization of high accuracy small feed also is having decisive crucial effect in exceeding accurate turning. Orgnaization of jiggle of the pottery and porcelain that suppress report basically is used at the following respects in exceeding accurate turning. (1) minim feed orgnaization is in in exceeding accurate turning, the accurate and tiny displacement that realizes cutting tool is the requirement that has superprecision. The precision level that superprecision can reach depends on greatly the discretion of level of small feed technology, if the control precision of public errand of spare parts dimension depends on the precision of transverse feed device [2] , increasingly arisen ultrathin cutting and asymmetrical curved surface turning need to use orgnaization of feed of high accuracy minim, study the result makes clear, the orgnaization of jiggle of the pottery and porcelain that suppress report that uses closed-loop control but better the requirement that satisfies this respect. The orgnaization of jiggle of the pottery and porcelain that suppress report that German DI company produces uses sensor of high accuracy capacitance to regard as measure component, can realize control of precision of accept rice class. (2) essence of compensatory of error of error compensation actuator is to pass the shift of kinematic pair to make cutting tool or workpiece are in of error of machine tool space turn over direction to produce opposite motion in order to eliminate an error. Error compensation is to pass change cutting deepness below most circumstance (metabolic quantity is equal to an error to be worth) will come true, and tool carrier of jiggle of the pottery and porcelain that suppress report can regard error compensatory actuator as direct drive cutting tool or workpiece make tiny displacement. Because press orgnaization of jiggle of electric pottery and porcelain to have high frequency noisy character, use one dimension to press tool carrier of jiggle of electric pottery and porcelain to amend result of error of circumgyrate of machine tool main shaft very good [3, 4] . Lathe of large and optical diamond all used the LODTM vertical that lathe of large and optical diamond mixes the DTM-3 horizontal that American LLL lab developed a success 1983 to developed a success 1984 to press tool carrier of jiggle of electric pottery and porcelain to regard error compensatory as actuator, the treatment precision that raised a machine tool [5] . Use 2 dimension to press tool carrier of jiggle of electric pottery and porcelain to compensate actuator as the error, can raise workpiece outline to machine precision substantially. (3) smooth board corrective actuator is in athletic error in exceeding accurate turning to machine, the machine tool is smooth board one of main error sources that linearity error of motion is influence treatment precision, rely on to rise only smooth board the treatment precision of component and assemble precision to assure completely to sneak away hard board athletic precision, if want on machine tool of type of production,will sneak away board linearity error control of motion is in 0. Less than of 200mm of ／ of 1 μ M is quite difficult, because this need is right smooth board motion undertakes an error corrective. Use orgnaization of jiggle of the pottery and porcelain that suppress report to regard as exceed accurate lathe to sneak away board the actuator effect with athletic corrective error is better. Industrial university uses Japanese Tokyo to be not a contact by type of standard straightedge, capacitance the control system that displacement plan and the orgnaization of jiggle of the pottery and porcelain that suppress report that regard an error as corrective executive component form undertook swift current board athletic error is corrective experiment, the displacement that measures workbench to make the same score direction in water in two sensor of workbench a side by installation and swing, feedback to undertake to orgnaization of jiggle of the pottery and porcelain that suppress report slideway is compensated in displacement of the lines next, make sneak away board be less than in the athletic linearity error of horizontal way 0. 600mm of ／ of 14 μ M, slant place be less than 0. 14 ″ [8] ; The person such as Hyung-seok 　 Lee uses TWYMAN-GREEN interferometer and orgnaization of jiggle of the pottery and porcelain that suppress report online measure and compensation is smooth board the linearity inside vertical plane, boil to place and sway error, make linearity achieves precision of accept rice class, boil to place and sway the error is achieved respectively 0.

1arcs and 0. 06arcs [9] ; The author is in HCM- Ⅰ exceed the one dimension that proper motion development uses on lathe of rigid numerical control to control tool carrier of jiggle of electric pottery and porcelain online compensation is smooth board linearity error, the effect when be being used at machining end panel and round cylinder is distinct [6, 7] . (4) actuator of closed-loop control system is machined to realize the outline of high accuracy, machine tool of demand numerical control has precision of extremely tall fixed position of odd axis axial not only, should have extremely tall double axis or match accuracy of much axis synchronism at the same time, because system of this numerical control had better use full closed-loop control. Although very tall control precision can be achieved in theoretic full closed-loop control, but because machinery is out of shape, the heat that temperature change causes is out of shape, the influence of the clearance between guide screw and nut, vibration and other element, the adjustment of stability of system of full closed-loop control, control is quite difficult. In addition, after the machine tool runs certain period, as a result of mechanical drive disk assembly wear away, be out of shape the change that reachs other element, make the systematic stability that already had adjusted is changed easily, make control precision happening to change thereby [10] . Use high-powered 2 dimension to press driver of electric pottery and porcelain to locate to exceeding the two axes of nicety lathe the error has synchronous closed-loop control, criterion the limitation that can better land overcomes system of conventional closed-loop control. The author is developing super- PC23 tally is used to measure referenced place on accurate lathe, laser interferometer measures the DISTAX 　 L-TM-20B Chan Pin that uses production of Japanese Tokyo company limited smooth board real position, use 2 dimension to press tool carrier of jiggle of electric pottery and porcelain to compensate the poor value of real position and referenced position, the repetition of the two axes after compensation locates precision can amount to ± 0. 02 μ M; The rough sketch that National University of Defense Technology Professor Li Shengyi uses 2 dimension to press tool carrier of jiggle of electric pottery and porcelain to exceed accurate lathe as control of double servo orgnaization machined precision to also obtain better result. (5) when actuator of active vibration isolator exceeds accurate turning to machine, the environment disturbs the influence of pair of treatment precision and exterior quality to not allow to ignore, like the environment oscillatory interference can cause the vibration of machine tool itself not only, still can cause cutting cutting tool and by the relatively oscillatory displacement between treatment spare parts, this will affect quality of the surface that be mixed by the precision of treatment spare parts directly, because this exceeds accurate lathe to must install the vibration isolation with superior performance, vibration absorber, if use active vibration isolator, criterion vibration isolation effect will be better. The author is in task group to undertaking study technically to active vibration isolator, specific plan is the installation below the exceeds accurate lathe lathe bed that developing orgnaization of jiggle of 3 pottery and porcelain that suppress report supports apparatus as vibration isolation, the oscillatory displacement volume that basis of orgnaization of jiggle of the pottery and porcelain that suppress report measures is synchronous and adjustable in order to make lathe bed maintains a level from beginning to end. Trial test result makes clear, the actuator that uses orgnaization of jiggle of the pottery and porcelain that suppress report to serve as active vibration isolator result of its vibration isolation is satisfactory. (6) the radius of circular arc of point of a knife after measuring orgnaization jiggle workbench to exceed accurate turning place to be ground with blade of classics of diamond lathe tool can amount to 20 ～ 50nm, it is quite difficult that its are measured. The author was in task group to develop technically to be used at measuring Xin Ren to grind the high accuracy of radius of circular arc of point of a knife of diamond lathe tool to measure equipment for this, one of its key components are workbench of 2 dimension jiggle, this workbench used orgnaization of jiggle of the pottery and porcelain that suppress report. Test result makes clear, workbench of jiggle of this 2 dimension all has very good degree of linearity on two direction, pass closed-loop control, the control precision of two direction all can achieve ± 0. 01 μ M. In addition, in exceeding accurate turning, measure the analysis the instrument to be like scanning channel microscope (STM) , scanning bougie fixed go up in the pottery and porcelain that suppress report, by orgnaization of jiggle of the pottery and porcelain that suppress report adjusts bougie and the distance between the sample that be measured accurately, can achieve workpiece appearance the high accuracy analysis of microcosmic form appearance is measured. 3. Although epilogue pressed orgnaization of jiggle of electric pottery and porcelain to get applied extensively in exceeding accurate turning, but the need that its control precision to still cannot satisfy the superprecision that develops increasingly, if be in ultrathin turning treatment, ± 0. Control precision and can not satisfy treatment requirement of 01 μ M. The orgnaization of jiggle of the pottery and porcelain that suppress report that at present home has not develop cashier rice class to control precision. Below the premise that makes sure the pottery and porcelain that suppress report produces quality, the control precision that carries orgnaization of jiggle of high-pressured report pottery and porcelain further basically needs to solve the following two problems: (1) the power source of drive of orgnaization of jiggle of the pottery and porcelain that suppress report with high-powered development. The fluctuant and immediate impact of voltage of output of drive power source presses the stability of orgnaization of jiggle of electric pottery and porcelain, the author fluctuates in voltage of the Ceng Yin in the experiment setting of limits of error is too small and the sink when bringing about closed-loop control system to move is dead circularly, the reason is drive power source output voltage is not stable cause the pottery and porcelain that suppress report ceaseless and adjustable. (2) use finite yuan the law optimizes flexibility of orgnaization of jiggle of the pottery and porcelain that suppress report to be out of shape further partial structure, be out of shape in order to raise its precision. What control precision as orgnaization of jiggle of the pottery and porcelain that suppress report is ceaseless rise, inevitable also meeting has the treatment precision that exceeds accurate turning to rise newly. CNC Milling